3219 South Platte River Drive - Englewood, Colorado

Tel 1.303.783.3172 - Fax 1.303.374.7342

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RSP150 Specifications

  • Pod cover
  • Reticle Retainer
  • Robotic Handling Flange
  • Pod Door
  • SEMI Std.]Compliant E111
  • Pod door available with or without N2 Valve
  • Pod door available with adsorbent filter
     

RSP150 Features and Benefits

  • For 6025 reticle
  • Metal free attachment eliminates reticle scratching
  • Robotic handling flange with 7 holes for easier manual handling
  • Reticle Retainer system provides ESD path to ground and enhanced strength
  • Low outgassing polycarbonate reduces the number of outgassing variables.
  • Clear PC window provides visibility to inspect reticle location and barcode
  • Pozzetta Positive Response confirms your order, your shipment, and our quality.

RSP150 Images
     

RSP200 Specifications

  • Standard Mechanical Interface Compatible
  • Door Base and Seal
  • Pod Shell made from low outgassing E80 resin
  • Superior ESD Performance
  • Plastic PEEK Screws
  • High performance PTFE filter;
    0.3DOP% removal rating
  • RFID holder for optional RFID tag
  • UV Control shell available
  • 10mm space above reticle surface available

RSP200 Features and Benefits

  • Accommodates 6025 mask
  • Haze Control: E80 resin has the lowest levels of SO4 and NH4 of any Inherently Dissipative Polymer.
  • Door open/close rod mechanism is made of plastic with high sliding performance which reduces particle generation.
  • Plastic PEEK screws used for easy disassembly/exchange of parts and easier maintenance of sliding part.
  • Proprietary design of reticle support and retainer make contact with only the reticle edge.
  • Metal free attachment eliminates reticle scratching.
  • Clear shell window provides visibility to inspect reticle location and barcode.

RSP200 Images
 
3219 South Platte River Drive - Englewood, Colorado   80110

Contact: sales@pozzetta.com

©2002, 2010 Pozzetta Products, Inc. All Rights Reserved. This page revised on    Contact the Editor.
 
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