| - |
Fully automated
pellicle glue ring removal with repeatable results |
| - |
Works on any
rectangular pellicle glue line |
| - |
FFU/ULPA protected
clean environment |
| - |
Eliminates the need
for sulfuric acid cleans |
| - |
ESD path to ground
and ionic protection are provided within the processing
chamber |
| - |
Actively protects
the active pattern area during process |
| - |
Adjustable PLC
controlled process parameters, i.e nano roto speed, force,
run cycle and chemistry dispense volume |
| - |
Equipped with
preset parameters for all major pellicle types, as well as
customizable recipe setup |
| - |
Dramatically
reduces cleaning time with a typical processing time of 15
minutes |
